发明名称 Optical source device and exposure device using the same
摘要 The present invention provides a light source device which has a discharge lamp and emits uniform light quantity for a long time, and an exposure device using the light source device. The light source device (10) includes: a lamp unit (18), including: a plurality of discharge lamps (30); and a reflector (31), disposed on each discharge lamp (30), reflecting the light emitted from each discharge lamp (30) in the same direction; an illuminance meter (20), for measuring illumination intensity of the light emitted from the lamp unit (18); ; as well as a lighting control device (22), having the functions of electrifying or turning off the discharge lamps (30) respectively, when started, under the state of cutting off the electricity of at least one spare discharge lamp (30), the other discharge lamps (30) are electrified, the actual illumination intensity are judged over or insufficient through comparing the actual illumination intensity measured by the illuminance meter (20) with the preset proper illumination intensity, so that discharge lamp (30) is turned on or off to release over or insufficient actual illumination intensity.
申请公布号 KR101314559(B1) 申请公布日期 2013.10.07
申请号 KR20070097811 申请日期 2007.09.28
申请人 发明人
分类号 F21Y101/00;H01L21/027;H01L31/12 主分类号 F21Y101/00
代理机构 代理人
主权项
地址