| 摘要 |
A semiconductor device comprises an isolation region formed by filling a trench with an insulator, an active region surrounded with the sidewall of the trench, a combined pillar including a semiconductor pillar in the active region and an insulator pillar in the isolation region, a gate electrode covering a side surface surrounding the combined pillar; and a transistor including the combined pillar and the gate electrode. The trench has a sidewall in a semiconductor substrate. The insulator pillar contacts the semiconductor pillar with the sidewall of the trench interposed therebetween.
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