发明名称 |
SUBSTRATE CARRIER AND SELENIZATION PROCESS SYSTEM THEREOF |
摘要 |
A substrate carrier is used for carrying a plurality of back electrode substrates into a furnace. Each back electrode substrate has a precursor layer formed thereon. The furnace is used for providing a process gas to react with the precursor layer, so as to form a photoelectric transducing layer on each back electrode substrate. The substrate carrier includes a heat-resistant metal frame and a first protective layer. The heat-resistant metal frame has a plurality of slots for supporting the plurality of back electrode substrates. The first protective layer is formed on the heat-resistant metal frame for preventing a chemical reaction of the heat-resistant metal frame with the process gas.
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申请公布号 |
US2013236844(A1) |
申请公布日期 |
2013.09.12 |
申请号 |
US201213465039 |
申请日期 |
2012.05.07 |
申请人 |
LEE SHIH-WEI;LIN CHING-JU;CHUNG CHIN-YUAN;LIN MING-HUNG;HUANG WEI-MIN;CHIU CHEN-HAI;AXUNTEK SOLAR ENERGY |
发明人 |
LEE SHIH-WEI;LIN CHING-JU;CHUNG CHIN-YUAN;LIN MING-HUNG;HUANG WEI-MIN;CHIU CHEN-HAI |
分类号 |
F27D5/00 |
主分类号 |
F27D5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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