| 摘要 |
A holder for fastening of rod substrates in reactor for growing of polycrystalline silicon contains adapter with fixed in it collet latch for arrangement of rod substrate, having mounted part, metal cooling current lead, connected with electrode, and current lead has receiving well, in which the mounted part of adapter is fixed, besides the depth of the receiving well of current lead is greater than the length of the mounted art of the adapter. |
