发明名称 SHEET ADHERING DEVICE AND ADHERING METHOD
摘要 A sheet adhering device (1) attaches an adhesive sheet (MS) that is attached in advance to an opening of a frame (RF) and is sized to protrude beyond an outer periphery of an adherend (W). The sheet adhering device (1) includes a pressing unit (8A, 8B) that presses the adhesive sheet (MS) to attach the adhesive sheet (MS) to the adherend (W) and a slack removal unit (4) that removes a slack of a part of the adhesive sheet protruded beyond the outer periphery of the adherend (W) after the adhesive sheet is attached by the pressing unit (8A, 8B).
申请公布号 KR20130100137(A) 申请公布日期 2013.09.09
申请号 KR20137007095 申请日期 2011.07.28
申请人 LINTEC CORPORATION 发明人 TAKANO TAKESHI
分类号 H01L21/301;H01L21/50;H01L21/683 主分类号 H01L21/301
代理机构 代理人
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