发明名称 MULTILAYER STRUCTURE AND METHOD FOR CLEANING SAME
摘要 <p>It has been difficult to provide a large-sized ceramic member quickly and economically. A multilayer structure is produced by forming a ceramic film on a base which is made of a material that can be shaped comparatively easily. The ceramic film is formed by a plasma spraying method, CVD method, PVD method, sol-gel method or the like. Alternatively, the ceramic film may be formed by a method combined with a spray deposit film.</p>
申请公布号 KR101306514(B1) 申请公布日期 2013.09.09
申请号 KR20087000427 申请日期 2006.07.12
申请人 发明人
分类号 H01L21/205;H01L21/3065 主分类号 H01L21/205
代理机构 代理人
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