| 摘要 |
<p>This charged particle beam device comprises: a charged particle source (101); an acceleration electrode (113); optical elements (106, 902, 903, 905) that adjust a primary charged particle beam (102); a temperature meter (901) that measures temperature changes in an objective lens (106); and a control device (128) that controls the acceleration electrode and the optical elements. The control device adjusts the optical elements when: (a) a first temperature change has been detected, when the acceleration voltage of the primary charged particle beam is greater than a prescribed value; and (b) when a second temperature change smaller than the first temperature change has been detected, when the acceleration voltage of the primary charged particle beam is no more than a prescribed value. As a result, it is possible to achieve both suppression of the impact on optical conditions when the acceleration voltage of the primary charged particle beam is changed, and increased device throughput.</p> |
