发明名称 Room temperature metal direct bonding
摘要 A bonded device structure including a first substrate having a first set of metallic bonding pads, preferably connected to a device or circuit, and having a first non-metallic region adjacent to the metallic bonding pads on the first substrate, a second substrate having a second set of metallic bonding pads aligned with the first set of metallic bonding pads, preferably connected to a device or circuit, and having a second non-metallic region adjacent to the metallic bonding pads on the second substrate, and a contact-bonded interface between the first and second set of metallic bonding pads formed by contact bonding of the first non-metallic region to the second non-metallic region. At least one of the first and second substrates may be elastically deformed.
申请公布号 US8524533(B2) 申请公布日期 2013.09.03
申请号 US20100913385 申请日期 2010.10.27
申请人 TONG QIN-YI;ENQUIST PAUL M.;ROSE ANTHONY SCOT;ZIPTRONIX, INC. 发明人 TONG QIN-YI;ENQUIST PAUL M.;ROSE ANTHONY SCOT
分类号 H01L21/00;H01L21/60;H01L21/98 主分类号 H01L21/00
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