| 摘要 |
PROBLEM TO BE SOLVED: To suppress variation in an orbit or speed of a target.SOLUTION: This target supply device may include: a target supply device body which includes a nozzle part where a through hole for emitting a target is formed; a piezoelectric member which has a first end and a second end, of which the length between the first end and the second end expands and contracts according to an electric signal from the outside, and in which the first end of the piezoelectric member is connected to the target supply device body; an elastic member which has a first end and a second end, of which the length between the first end and the second end expands and contracts according to external force, and in which the first end of the elastic member is connected to the second end of the piezoelectric member; and a regulation member which regulates distance between the second end of the elastic member and the target supply device body. |
