| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive conveyance technique capable of stably conveying an object to be conveyed in a non-contact manner, even when a plurality of rails are arranged in a conveyance direction to constitute a conveyance line.SOLUTION: A plurality of compressed gas blowing ports 22 blowing out compressed gas supplied to a ventilation passage and blowing it onto a substrate 5 on a conveyance face 20, and a plurality of swirl flow generating parts 23 blowing out the compressed gas to generate a swirl flow, are formed on the conveyance face 20 of a rail 2. The plurality of swirl flow generating parts 23 are formed at least to a position on the conveyance face 20 corresponding to a rear end part 51b of the substrate 5 when a tip part 51a of the substrate 5 reaches a rear end part 21b in a conveyance direction A of the conveyance face 20 of a following rail 2, and to a position on the conveyance face 20 corresponding to a tip part 51a of the substrate 5 when the rear end part 51b of the substrate 5 reaches a front end part 21a in the conveyance direction A of the conveyance face 20 of the rail 2. The plurality of compressed gas blowing ports 22 are formed to a whole surface of an area 28 on the conveyance face 20 excluding areas 29 to which the swirl flow generating parts 23 are formed. |
