发明名称 CARBON THIN FILM, MOLD FOR MOLDING OPTICAL ELEMENT, AND METHOD FOR MANUFACTURING OPTICAL ELEMENT
摘要 A ta-C thin film (1A) is formed by laminating a first unit structure (11) and a second unit structure (12) in this order on a base material (10). The first unit structure (11) has mutually different amounts of sp3 bonding in a first layer (11a) and a second layer (11b), and has mutually different amounts of sp3 bonding in the second layer (11b) and a third layer (11c). The second unit structure (12) has mutually different amounts of sp3 bonding in a first layer (12a) and a second layer (12b), and has mutually different amounts of sp3 bonding in the second layer (12b) and a third layer (12c).
申请公布号 US2013221548(A1) 申请公布日期 2013.08.29
申请号 US201313859246 申请日期 2013.04.09
申请人 NIKON CORPORATION;NIKON CORPORATION 发明人 IWAHORI KOICHIRO
分类号 C30B29/02 主分类号 C30B29/02
代理机构 代理人
主权项
地址
您可能感兴趣的专利