发明名称 |
CARBON THIN FILM, MOLD FOR MOLDING OPTICAL ELEMENT, AND METHOD FOR MANUFACTURING OPTICAL ELEMENT |
摘要 |
A ta-C thin film (1A) is formed by laminating a first unit structure (11) and a second unit structure (12) in this order on a base material (10). The first unit structure (11) has mutually different amounts of sp3 bonding in a first layer (11a) and a second layer (11b), and has mutually different amounts of sp3 bonding in the second layer (11b) and a third layer (11c). The second unit structure (12) has mutually different amounts of sp3 bonding in a first layer (12a) and a second layer (12b), and has mutually different amounts of sp3 bonding in the second layer (12b) and a third layer (12c).
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申请公布号 |
US2013221548(A1) |
申请公布日期 |
2013.08.29 |
申请号 |
US201313859246 |
申请日期 |
2013.04.09 |
申请人 |
NIKON CORPORATION;NIKON CORPORATION |
发明人 |
IWAHORI KOICHIRO |
分类号 |
C30B29/02 |
主分类号 |
C30B29/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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