发明名称 Performance Optically Coated Semiconductor Devices and Related Methods of Manufacture
摘要 The present application disclosed various embodiments of improved performance optically coated semiconductor devices and various methods for the manufacture thereof and includes depositing a first layer of a low density, low index of refraction material on a surface of a semiconductor device, depositing a multi-layer optical coating comprising alternating layers of low density, low index of refraction materials and high density, high index of refraction materials on the coated surface of the semiconductor device, selectively ablating a portion of the alternating multi-layer optical coating to expose at least a portion of the low density first layer, and selectively ablating a portion of the first layer of low density material to expose at least a portion of the semiconductor device.
申请公布号 US2013221467(A1) 申请公布日期 2013.08.29
申请号 US201313861875 申请日期 2013.04.12
申请人 NEWPORT CORPORATION;NEWPORT CORPORATION 发明人 KNAPP JAMIE
分类号 H01L31/0232 主分类号 H01L31/0232
代理机构 代理人
主权项
地址