FILM FORMING DEVICE AND SUBSTRATE CONVEYING APPARATUS THEREFOR,申请号KR20130007436-传众专利搜索

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发明名称	FILM FORMING DEVICE AND SUBSTRATE CONVEYING APPARATUS THEREFOR
摘要
申请公布号	KR20130096175(A)	申请公布日期	2013.08.29
申请号	KR20130007436	申请日期	2013.01.23
申请人	HITACHI HIGH-TECHNOLOGIES CORPORATION	发明人	WAKABAYASHI TADASHI;KATO NOBORU;ZUSHI IORI;ISHIZAWA YASUAKI
分类号	H01L51/56;C23C14/24;H05B33/10	主分类号	H01L51/56
代理机构		代理人
主权项
地址

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