| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect inspection device, a defect inspection method, and a program capable of properly determining the presence/absence of defects in an inspection object.SOLUTION: A defect inspection device includes: an area information obtaining portion 103 for performing binarization processing on image information of an inspection object, and obtaining area information of a defect candidate; a position calculating portion 105a for calculating a position of the defect candidate; an area calculating portion 104 for calculating an area of the defect candidate; a feature vector extracting area deciding portion 105b for deciding an area for extracting a feature vector of the defect candidate; a feature vector extracting portion 107 for extracting a feature vector of the detect candidate; a type discriminating portion 108 for discriminating a type of the defect candidate by comparing each feature vector extracted by the feature vector extracting portion 107 with a boundary condition given in advance; and a defect determining portion 110 for determining the presence/absence of a defect in the inspection object by comparing the type, position, and area of the defect candidate respectively with discrimination references given in advance. |
