发明名称 |
FINFETS AND METHOD OF FABRICATING THE SAME |
摘要 |
The disclosure relates to a fin field effect transistor (FinFET). An exemplary structure for a FinFET comprises a substrate comprising a major surface; a plurality of first trenches having a first width and extending downward from the substrate major surface to a first height, wherein a first space between adjacent first trenches defines a first fin; and a plurality of second trenches having a second width less than first width and extending downward from the substrate major surface to a second height greater than the first height, wherein a second space between adjacent second trenches defines a second fin.
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申请公布号 |
US2013221443(A1) |
申请公布日期 |
2013.08.29 |
申请号 |
US201213407507 |
申请日期 |
2012.02.28 |
申请人 |
LIN YU CHAO;PENG CHIH-TANG;YANG SHUN-HUI;CHEN RYAN CHIA-JEN;CHEN CHAO-CHENG;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. |
发明人 |
LIN YU CHAO;PENG CHIH-TANG;YANG SHUN-HUI;CHEN RYAN CHIA-JEN;CHEN CHAO-CHENG |
分类号 |
H01L27/088;H01L21/768;H01L29/78 |
主分类号 |
H01L27/088 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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