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发明名称
FILM CLEANING APPARATUS FOR SUBSTRATE
摘要
申请公布号
KR20130092315(A)
申请公布日期
2013.08.20
申请号
KR20120013975
申请日期
2012.02.10
申请人
SFA ENGINEERING CORP.
发明人
LEE, GYEONG NAM;OH, CHANG IK;BHANG, SHIN HAN;PARK, YOUNG KEUN;JO, WON IL
分类号
H01L21/302
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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