| 摘要 |
PURPOSE: A base member for the grinding of a large electrostatic chuck for display substrate is provided to operate a height controlling means that is provided in a support member, thereby precisely and simply maintaining the flatness for the grinding work of the deformed electrostatic chuck. CONSTITUTION: A base member for the grinding of a large electrostatic chuck includes a main base (40), at least two setting members (30), a coupling member (35), at least one support member (20), and an electrostatic chuck fixing means (15). The at least one support member operates a height controlling means (21) that is provided in the support member so as to compensate the error which is measured by the height measurement machine installed at the upper portion of electrostatic chuck (10), and maintains the flatness of upper dielectric layer surface of electrostatic chuck. The electrostatic chuck fixing means stably maintains the flatness by action of pulling the electrostatic chuck by fixing a fixed bar (12), which is inserted in a hook (11), by rotating a control screw (13) that is provided on both sides of main base (40). |
