| 摘要 |
PROBLEM TO BE SOLVED: To respond to a request for enhancing the stability of holding of a finely positioned stage at a target position.SOLUTION: A driving control unit 9 performs coarse positioning control for positioning a stage 5 at a target position by moving the stage 5 toward the target position by a coarse adjustment driving unit until the absolute value of a position deviation becomes less than a first threshold, fine positioning control for positioning the stage 5 at the target position by moving the stage 5 toward the target position by a fine adjustment driving unit 9 until the absolute value of the position deviation becomes less than a second threshold after the coarse positioning control and holding control for holding the stage 5 at the target position by moving the stage 5 toward the target position by the fine adjustment driving unit 9 when the absolute value of the position deviation becomes larger than a third threshold after the fine positioning control. |
