发明名称
摘要 A light processing apparatus irradiates an ultra violet light through a square or a rectangular light transmitting window onto a work piece that has a square or rectangular pattern formation portion. The apparatus includes a light emitting unit that comprises a casing, an ultraviolet irradiance lamp arranged inside the casing and the light transmitting window member provided in one face of the casing. One side of the light transmitting window and one side of the pattern formation portion are not parallel to each other.
申请公布号 JP5257480(B2) 申请公布日期 2013.08.07
申请号 JP20110069688 申请日期 2011.03.28
申请人 发明人
分类号 H01L21/027 主分类号 H01L21/027
代理机构 代理人
主权项
地址