发明名称 |
METHOD FOR FORMING NANOSTRUCTURE ARRAY |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for easily and reproducibly forming a nanostructure monolayer.SOLUTION: A method for forming a nanostructure array comprises: providing a first layer; providing nanostructures dispersed in a solution comprising a liquid form of a spin-on-dielectric, the liquid form of the spin-on-dielectric containing silsesquioxane; disposing the solution on the first layer, so that the nanostructures form a monolayer array on the first layer; and curing the liquid form of the spin-on-dielectric to provide a solid form of the spin-on-dielectric as a matrix in which the nanostructures are randomly distributed in the monolayer array. |
申请公布号 |
JP2013149986(A) |
申请公布日期 |
2013.08.01 |
申请号 |
JP20130036437 |
申请日期 |
2013.02.26 |
申请人 |
SANDISK CORP |
发明人 |
MADHURI L NALLABOLU;LIU CHAO;DUAN XIANGFENG;CHIANG CHEN;J WALLACE PARCE;KAREN CHU CRUDEN;SRIKANTH RANGANATHAN |
分类号 |
H01L29/06;B82Y20/00;B82Y40/00;H01L21/28;H01L21/336;H01L21/82;H01L21/8247;H01L27/10;H01L27/115;H01L29/739;H01L29/788;H01L29/792 |
主分类号 |
H01L29/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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