发明名称 METHOD FOR FORMING NANOSTRUCTURE ARRAY
摘要 PROBLEM TO BE SOLVED: To provide a method for easily and reproducibly forming a nanostructure monolayer.SOLUTION: A method for forming a nanostructure array comprises: providing a first layer; providing nanostructures dispersed in a solution comprising a liquid form of a spin-on-dielectric, the liquid form of the spin-on-dielectric containing silsesquioxane; disposing the solution on the first layer, so that the nanostructures form a monolayer array on the first layer; and curing the liquid form of the spin-on-dielectric to provide a solid form of the spin-on-dielectric as a matrix in which the nanostructures are randomly distributed in the monolayer array.
申请公布号 JP2013149986(A) 申请公布日期 2013.08.01
申请号 JP20130036437 申请日期 2013.02.26
申请人 SANDISK CORP 发明人 MADHURI L NALLABOLU;LIU CHAO;DUAN XIANGFENG;CHIANG CHEN;J WALLACE PARCE;KAREN CHU CRUDEN;SRIKANTH RANGANATHAN
分类号 H01L29/06;B82Y20/00;B82Y40/00;H01L21/28;H01L21/336;H01L21/82;H01L21/8247;H01L27/10;H01L27/115;H01L29/739;H01L29/788;H01L29/792 主分类号 H01L29/06
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