发明名称 SEMICONDUCTOR DEVICE, MANUFACTURING DEVICE AND METHOD, AND IMAGE PICKUP ELEMENT
摘要 PROBLEM TO BE SOLVED: To enable local control of electric charge in the vicinity of an insulating layer.SOLUTION: A semiconductor device comprises: an insulating layer, such as a silicon oxide film, formed on a silicon substrate; and a silicon layer formed on the insulating layer and comprising, e.g., circuit elements of an integrated circuit formed therein. In the insulating layer, a charge storage layer for storing electric charge, such as a silicon nitride film, is locally formed. This disclosure is applicable not only to the semiconductor device also to a manufacturing device and method and to an image pickup element.
申请公布号 JP2013149811(A) 申请公布日期 2013.08.01
申请号 JP20120009586 申请日期 2012.01.20
申请人 SONY CORP 发明人 NAKAZAWA KEIICHI;YOSHIDA SHINICHI
分类号 H01L21/336;H01L21/02;H01L21/8238;H01L27/08;H01L27/092;H01L27/12;H01L27/146;H01L29/786;H01L31/10 主分类号 H01L21/336
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