| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a drawing data distributed processing method and a mask drawing apparatus, which increase a total throughput by effectively utilizing resources of calculation nodes in distributed processing of drawing data. <P>SOLUTION: In the drawing data distributed processing method, when calculation nodes to which distributed processing is assigned execute distributed processing of one chip data and a transfer calculation node transfers the processed chip data to the mask drawing apparatus, before the transfer is finished, distributed processing of the next chip data is assigned to calculation nodes having available resources. The transfer of the one chip data and the distributed processing of the next chip data are executed in parallel successively. The mask drawing apparatus is also provided. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
