| 摘要 |
PROBLEM TO BE SOLVED: To provide an exfoliating device, an exfoliating system, an exfoliating method and an exfoliating program capable of properly exfoliating a substrate.SOLUTION: An exfoliating device according to an embodiment comprises a first holding section, a second holding section, a moving mechanism, and a suction moving section. The first holding section suction-holds a first substrate. The second holding section suction-holds a center part of a second substrate jointed to the first substrate. The moving mechanism moves the second holding section in a direction away from the first holding section. The suction moving section sucks a partial region of an outer periphery of the second substrate held by the second holding section, and moves the partial region in a direction away from a plate surface of the first substrate. |
