发明名称 STABLE P-TYPE SEMICONDUCTING BEHAVIOR IN LI AND NI CODOPED ZNO
摘要 <p>A method is provided for growing a stable p-type ZnO thin film with low resistivity and high mobility. The method includes providing an n-type Li—Ni co-doped ZnO target in a chamber, providing a substrate in the chamber, and ablating the target to form the thin film on the substrate.</p>
申请公布号 KR101288517(B1) 申请公布日期 2013.07.26
申请号 KR20127007722 申请日期 2010.08.10
申请人 发明人
分类号 H01L33/26;H01L33/28 主分类号 H01L33/26
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