发明名称 LEAK DETECTION APPLIANCE
摘要 The leak detection appliance has a test inlet to which a test chamber containing the test specimen can be connected. A high-vacuum pump produces a high vacuum in a test gas detector. A preliminary vacuum pump contains two pump stages. In order to evacuate the test chamber, the pump stages are operated in parallel mode, with their suction capabilities being added. When the necessary vacuum has been achieved, the pump stages are operated in series in order to produce the necessary high vacuum-which is required for high detection sensitivity-on the test gas detector.
申请公布号 US2013186183(A1) 申请公布日期 2013.07.25
申请号 US201113813575 申请日期 2011.07.20
申请人 DOEBLER ULRICH;INFICON GMBH 发明人 DOEBLER ULRICH
分类号 G01M3/26 主分类号 G01M3/26
代理机构 代理人
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