| 摘要 |
PROBLEM TO BE SOLVED: To achieve more certain division of a workpiece configured by forming a dissimilar material layer on a substrate. SOLUTION: A machining method for forming a division starting point on the workpiece includes: a placing step of placing the workpiece on a stage; a preliminary machining step of exposing a base substrate at the position of a first preset machining line by irradiating with a first laser beam from a first light source along the first preset machining line; and a regular machining step of generating cleavage or parting of the base substrate between the regions to be irradiated by irradiating the exposed portion of the base substrate with a second laser beam which is an ultrashort pulsed light having a pulse width of a picosecond order from a second light source in such a manner that an irradiation region for each unit pulsed light is formed discretely. The preliminary and regular machining processes are performed while moving the stage to a first direction. COPYRIGHT: (C)2012,JPO&INPIT |
