METHOD FOR PRODUCING GALLIUM HYDROXIDE, METHOD FOR PRODUCING GALLIUM OXIDE POWDER, GALLIUM OXIDE POWDER, GALLIUM OXIDE SINTERED COMPACT AND SPUTTERING TARGET FORMED FROM SINTERED COMPACT

摘要

A method for producing gallium hydroxide is characterized in that gallium hydroxide is crystallized by electrolysis in an aqueous ammonium nitrate solution using liquid gallium metal as the anode. A method for producing a gallium oxide powder is characterized in that gallium hydroxide is dried and calcined to obtain gallium oxide powder. Provided is technology relating to a gallium oxide and gallium oxide powder that can be produced easily and inexpensively, as well as a sintered compact and sputtering target produced from the powder. A high-density target can be produced without the formation of cracks or sintering defects during the target production steps.