发明名称 |
EVAPORATION DEVICE FOR MANUFACTURING OF OLED HAVING EVAPORATION LOSS CONTROL DEVICE OF ORGANIC MATTER |
摘要 |
PURPOSE: A deposition device for manufacturing an organic light emitting device having a deposition chamber and an organic matter deposition amount control unit is provided to precisely control the deposition amount of organic matter, thereby forming a thin film in a desired thickness. CONSTITUTION: A substrate to be treated is positioned on a deposition chamber. The deposition chamber sets up an evaporation source in the lower portion thereof. The evaporation source evaporates an organic matter. At least one opening portion (24) is formed at a crucible (22) of the evaporation source. An organic matter deposition amount control unit (100) controls the evaporation amount of the organic matter.
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申请公布号 |
KR20130078734(A) |
申请公布日期 |
2013.07.10 |
申请号 |
KR20110147845 |
申请日期 |
2011.12.30 |
申请人 |
LIGADP CO., LTD. |
发明人 |
KIM, YOUNG HAK;KIM, HYO JU |
分类号 |
H01L51/56 |
主分类号 |
H01L51/56 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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