发明名称 EVAPORATION DEVICE FOR MANUFACTURING OF OLED HAVING EVAPORATION LOSS CONTROL DEVICE OF ORGANIC MATTER
摘要 PURPOSE: A deposition device for manufacturing an organic light emitting device having a deposition chamber and an organic matter deposition amount control unit is provided to precisely control the deposition amount of organic matter, thereby forming a thin film in a desired thickness. CONSTITUTION: A substrate to be treated is positioned on a deposition chamber. The deposition chamber sets up an evaporation source in the lower portion thereof. The evaporation source evaporates an organic matter. At least one opening portion (24) is formed at a crucible (22) of the evaporation source. An organic matter deposition amount control unit (100) controls the evaporation amount of the organic matter.
申请公布号 KR20130078734(A) 申请公布日期 2013.07.10
申请号 KR20110147845 申请日期 2011.12.30
申请人 LIGADP CO., LTD. 发明人 KIM, YOUNG HAK;KIM, HYO JU
分类号 H01L51/56 主分类号 H01L51/56
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