发明名称 |
METHOD FOR CONTROLLING ION BEAM IRRADIATION BY PULSE OPERATION |
摘要 |
PURPOSE: A method for controlling the dosage of ion beams is provided to control an average current while maintaining a peak current by controlling a pulse repetition rate or a pulse width according to the dosage of ion beams. CONSTITUTION: A withdrawal electrode surrounds a plasma generating unit. An ion source (10) includes the plasma generating unit, the withdrawal electrode, and a ground electrode. The ground electrode is separated from the withdrawal electrode. A stage (20) is equipped with an emitted object. A power unit (50) applies a voltage to both terminals of the withdrawal electrode and the ground electrode.
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申请公布号 |
KR20130077256(A) |
申请公布日期 |
2013.07.09 |
申请号 |
KR20110145866 |
申请日期 |
2011.12.29 |
申请人 |
KOREA ATOMIC ENERGY RESEARCH INSTITUTE |
发明人 |
CHO, YONG SUB;KWON, HYEOK JUNG |
分类号 |
H01J37/317 |
主分类号 |
H01J37/317 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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