| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate fixation module capable of stably supporting and fixing a substrate irrespective of thickness of the substrate, and easily fixing all the substrates with different thickness, and a substrate inspection device having the same.SOLUTION: A substrate fixation module 100 includes: a support 110 which supports a lower part of a substrate 101, in which parts 113 where both ends 101a in the thickness direction of the substrate 101 are located have level difference shapes; and a pair of clamps 120 which press and fix both ends 101a in the thickness direction of the substrate 110, respectively, and in which inclined parts 120a are formed at parts contacting both ends 101a in the thickness direction of the substrate 101. |
