| 摘要 |
<p>A positioning device (30) and a positioning method for positioning supporting means (10) for supporting an article (2), in particular a stage (10) for supporting a semiconductor wafer 2, are provided. The positioning device (30) com prises at least two scales (33, 34, 35) for measuring the position of said supporting means (10), and at least two read heads (31, 32) for reading said at least two scales (33, 34, 35), wherein each one of said at least two read heads (31, 32) is positioned such that at least one (31) of said at least two read heads (31, 32) can read one scale (33) of said at least two scales (33, 34, 35).</p> |
