| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning system capable of separating impurities from a cleaning fluid without taking time/labor and also spending expenses beyond the reasonable limits.SOLUTION: This cleaning system 10 includes a gas chromatograph 20 which detects impurities contained in the cleaning fluid, a vapor/liquid separator 18 which separates the impurities from the cleaning fluid and a controller 21. The gas chromatograph 20 detects the impurities remaining in the cleaning fluid after flowing out of the vapor/liquid separator 18, and outputs the detection results obtained by an impurities detection means, to the controller 21. The controller 21 adjusts the pressure of the cleaning fluid inside the vapor/fluid separator 18 to an optimal pressure level suited to the impurities remaining in the cleaning fluid, so that the impurities remaining in the cleaning fluid left over after flowing out of the vapor/fluid separator 18 can disappear in the cleaning fluid. Further, the temperature of the cleaning fluid inside the vapor/fluid separator 18 is adjusted to an optimal temperature level suited to the impurities remaining in the cleaning fluid. |
