A PUMP SYSTEM, A CARBON DIOXIDE SUPPLY SYSTEM, AN EXTRACTION SYSTEM, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD

摘要

PURPOSE: A pump system, a carbon dioxide supplying system, an extracting system, a lithography apparatus and a device manufacturing method are provided to use a pressure switch instead of a sensor which measures the absolute pressure, thereby improving the safety. CONSTITUTION: A valve(120) is located in a supply line(110). The valve has an opening position and a closing position. A control system comprises a first switch(150) and a second switch(160). The first switch switches an output in a first flow rate or pressure inside the supply line. The second switch switches an output in a second flow rate or pressure inside the supply line.