METHOD OF CHARACTERIZING A PATTERN

摘要

The present invention relates to a method of characterizing a pattern comprising the steps of: - determination of an image of the contour of the pattern to be characterized by means of an imagining instrumentation; - processing of said image including the determination of a plurality of points located along said contour and sampled according to a given sampling interval; - for each point, identification of a point located on a reference contour and corresponding to the same sampling interval number and determination of a dimensionless intermediate coefficient representative of the deviation between said point and the corresponding point on said reference contour; - determination of a final dimensionless coefficient on the basis of the set of intermediate coefficients corresponding to said plurality of points, said final coefficient being representative of the deviation between the contour of the pattern to be characterized and the reference contour.