| 摘要 |
The present invention provides a device for treating substrates and a support frame thereof. By means of the support frame, it is capable of using a space below a timber support used for maintenance operations and the like of the device for treating the substrate efficiently. On the support frame (140) located on ground for supporting the device (100) which is provided with a plurality of treating chambers (110), a portion away from the ground by a presetting height is provided with the timber support (160) directly in a mode of projecting toward an external side from the circumference of thetreating chambers. The timber support is provided with a plurality of support brackets (162) mounted on the external side of the support frame, and a timber support plate (164) supported by the support brackets horizontally. |
