| 摘要 |
PURPOSE: A device and a method for measuring the vibration of an edge dam are provided to measure vibration frequencies and the size of the edge dam by using an etched template with a noncontact method, thereby confirming an operation state of the edge dam on a real time basis. CONSTITUTION: A device for measuring the vibration of an edge dam(3a) comprises an image acquisition module(210), a position data extracting module(220a), a Fourier transform module(220b), and a vibration measuring module(220c). The image acquisition module acquires image frames including an etched template. The position data extracting module extracts the position data of a time domain of the template by the vibration of the edge dam from the image frames acquired by the image acquisition module. The vibration measuring module calculates vibration frequencies and the size of the edge dam based on the position data of a frequency domain converted by the Fourier transform module.
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