METHOD AND APPARATUS FOR MAGNETIC STIRRING

摘要

A system for combinatorially processing a substrate is provided. The system includes a reactor or chemical library having a plurality of chambers defined within the reactor or library, the chambers operable to mix fluids disposed therein. A drive system is disposed below a bottom surface of the reactor. The drive system is operable to rotate a plurality of support plates below the surface of the substrate. The plurality of support plates has a non-circular shape. The non-circular shape of adjacent support plates includes extensions configured to traverse overlapping regions of rotation during rotation of adjacent support plates. Each of the extensions has a magnet disposed thereon.