| 摘要 |
PURPOSE: A carbon heater is provided to enable a quartz tube to move in the length direction, thereby maximizing availability of heating of the quartz tube. CONSTITUTION: A quartz tube(110) has one side which is formed with a sealing unit(111) to maintain the inside of the quartz tube to be in a vacuum state. A carbon fiber element(120) is installed inside the quartz tube(110), and formed with a coil shape which dissipates heat when power is applied to the carbon fiber element. A pair of power lines(130) are inserted into the side of the sealing unit(111), and connected to the carbon fiber heating element(120). A movable unit(200) supports the quartz tube(110), and is placed on one side of the quartz tube(110) so that the quartz tube is movably installed on the movable unit. A supporting member(210) has the sealing unit(111) of the quartz tube which is inserted and fixed inside, and has a male thread which is formed on the outer circumferential surface. The housing(2210) is formed with a female thread on the inner circumferential surface to be screw-connected to the supporting member(210). The rotation member(220) is composed of a bent piece(225) which is extended from the end part of the lower end of the housing(221), and bent; and formed with a cylindrical shape.
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