| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a fine vibration removing mechanism for actualizing a sample stage capable of improving image quality of an observation image suppressing fine vibrations of a top table. <P>SOLUTION: The fine vibration removing mechanism includes a movable part mounted on the top table, a fixed part mounted on an intermediate table, an elastic support part for elastically supporting the movable part for the fixed part, and piezoelectric actuators which drive the movable part for the fixed part. The elastic support part is arranged connecting four corners of the fixed part and four corners of the movable part to each other, and the piezoelectric actuators are arranged on both X-axial sides of the fixed part along the same straight line, and include a pair of X-axial piezoelectric actuators extending and contracting in mutually opposite directions and a pair of Y-axial piezoelectric actuators arranged on both Y-axial sides of the fixed part along the same straight line, and extending and contracting in mutually opposite directions. <P>COPYRIGHT: (C)2013,JPO&INPIT |
