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发明名称
摘要
申请公布号
JP5206673(B2)
申请公布日期
2013.06.12
申请号
JP20090514043
申请日期
2008.04.15
申请人
发明人
分类号
C04B35/472;H01L41/09;H01L41/187;H01L41/22
主分类号
C04B35/472
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