发明名称 |
Electron cyclotron resonance ion source and method of manufacturing the same |
摘要 |
An apparatus of an electron cyclotron resonance ion source may include: a magnet unit containing a magnet for generating magnetic fields; an ionizing chamber housing unit for generating ions through electron cyclotron resonance from a plasma; a microwave generating unit for injecting microwaves to the ionizing chamber housing unit to generate ions; and a beam integrating and guiding unit for treating the generated ions. The magnet unit may include: a bobbin for winding the magnet; a variable spacer for dividing the bobbin into a plurality of sections; and the magnet which is wound into the form of a wire or a tape in the plurality of sections formed by the variable spacer. |
申请公布号 |
US8461763(B2) |
申请公布日期 |
2013.06.11 |
申请号 |
US200913000501 |
申请日期 |
2009.11.16 |
申请人 |
WON MI-SOOK;LEE BYOUNG-SEOB;KIM JONG-PIL;YOON JANG-HEE;BAE JONG SEONG;BANG JEONG KYU;LEE HYOSANG;PARK JINYONG;KOREA BASIC SCIENCE INSTITUTE |
发明人 |
WON MI-SOOK;LEE BYOUNG-SEOB;KIM JONG-PIL;YOON JANG-HEE;BAE JONG SEONG;BANG JEONG KYU;LEE HYOSANG;PARK JINYONG |
分类号 |
H01J7/24 |
主分类号 |
H01J7/24 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|