| 摘要 |
PURPOSE: A module and a method for treating a substrate are provided to accurately measure the temperature of a susceptor by shielding light emitting from a heating unit. CONSTITUTION: A susceptor is transferred into a substrate processing apparatus(110a, 110b). A substrate is loaded on the susceptor. The substrate processing apparatus performs substrate processing. The susceptor is transferred to a substrate transferring part(180). A cassette having the substrate is stacked on the substrate transferring part. |
