HIGH EFFICIENCY RECYCLING METHOD AND SYSTEM FOR SAWING LIQUID IN WASTE SLUDGE FORMED BY SEMICONDUCTOR AND SOLAR CELL WAFER USING MEMBRANE PROCESS

摘要

PURPOSE: A high efficiency recycling method and a recycling method system for sawing liquid in waste sludge formed by a semiconductor and a solar cell wafer using a membrane process are provided to effectively filter metal impurities and fine particles by using a membrane. CONSTITUTION: A membrane filters waste sawing liquid to separate fine particles and metallic impurities. Water is removed in a process of collecting regeneration sawing liquid. A regeneration process is performed to clear a blockage in a layer and to recover a filtering function. Concentrated waste sludge generated in the process of collecting the sawing liquid and remaining liquid are separated. High purity sawing liquid is produced by removing the wafer from the regeneration sawing liquid. [Reference numerals] (a) Wafer waste slurry; (A) Fine particle removing process; (AA) High purity regeneration sawing fluid; (b) High speed centrifugal filtration; (B) Moisture control and removing process; (BB) High purity regeneration sawing fluid(sawing water); (c) Large particle removal; (C) Filtration membrane regeneration process; (d) Flow buffer tank; (D) Concentrate solid-liquid separation process; (e) Mix buffer tank; (E) High dehydration process; (h) CIP 1,2,3,4 circulation pipe; (m) Concentrated buffer tank