| 发明名称 |
AUTOMATIC CONTROL SYSTEM FOR SELECTION AND OPTIMIZATION OF CO-GAS FLOW LEVELS |
| 摘要 |
An ion implantation system for improving performance and extending lifetime of an ion source is disclosed whereby the selection, delivery, optimization and control of the flow rate of a co-gas into an ion source chamber is automatically controlled.
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| 申请公布号 |
WO2013081647(A1) |
申请公布日期 |
2013.06.06 |
| 申请号 |
WO2012US00574 |
申请日期 |
2012.12.13 |
| 申请人 |
AXCELIS TECHNOLOGIES, INC.;COLVIN, NEIL;HSIEH, TSEH-JEN |
发明人 |
COLVIN, NEIL;HSIEH, TSEH-JEN |
| 分类号 |
H01J37/317;H01J27/02;H01J37/08 |
主分类号 |
H01J37/317 |
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