发明名称 |
PRECURSOR COMPOSITION FOR FORMING AMORPHOUS METAL OXIDE SEMICONDUCTOR LAYER, AMORPHOUS METAL OXIDE SEMICONDUCTOR LAYER, METHOD FOR PRODUCING SAME, AND SEMICONDUCTOR DEVICE |
摘要 |
The invention provides a precursor composition for forming an amorphous metal oxide semiconductor layer, containing a metal salt, a primary amide, and a water-based solution. An amorphous metal oxide semiconductor layer is formed by use of the composition.
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申请公布号 |
US2013140503(A1) |
申请公布日期 |
2013.06.06 |
申请号 |
US201113811586 |
申请日期 |
2011.07.26 |
申请人 |
HIROI YOSHIOMI;MAEDA SHINICHI;NISSAN CHEMICAL INDUSTRIES, LTD. |
发明人 |
HIROI YOSHIOMI;MAEDA SHINICHI |
分类号 |
H01L29/24;H01L21/02 |
主分类号 |
H01L29/24 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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