发明名称 PRECURSOR COMPOSITION FOR FORMING AMORPHOUS METAL OXIDE SEMICONDUCTOR LAYER, AMORPHOUS METAL OXIDE SEMICONDUCTOR LAYER, METHOD FOR PRODUCING SAME, AND SEMICONDUCTOR DEVICE
摘要 The invention provides a precursor composition for forming an amorphous metal oxide semiconductor layer, containing a metal salt, a primary amide, and a water-based solution. An amorphous metal oxide semiconductor layer is formed by use of the composition.
申请公布号 US2013140503(A1) 申请公布日期 2013.06.06
申请号 US201113811586 申请日期 2011.07.26
申请人 HIROI YOSHIOMI;MAEDA SHINICHI;NISSAN CHEMICAL INDUSTRIES, LTD. 发明人 HIROI YOSHIOMI;MAEDA SHINICHI
分类号 H01L29/24;H01L21/02 主分类号 H01L29/24
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