发明名称 |
Method of manufacturing solid state imaging device, solid state imaging device, and camera using solid state imaging device |
摘要 |
A method of manufacturing a solid state imaging device having a photo-electric conversion portion array and a transfer electrode array, these arrays being provided in parallel to each other, upper surfaces and side wall surfaces of the transfer electrode array being covered with a light-shielding layer, and a transparent layer showing an oxidizing property at the time of film formation, the transparent layer being formed on the photo-electric conversion parts and the light-shielding layer.
|
申请公布号 |
US8455291(B2) |
申请公布日期 |
2013.06.04 |
申请号 |
US201113017876 |
申请日期 |
2011.01.31 |
申请人 |
TAKEDA TAKESHI;DOFUKU TADAYUKI;TAKEO KENJI;SONY CORPORATION |
发明人 |
TAKEDA TAKESHI;DOFUKU TADAYUKI;TAKEO KENJI |
分类号 |
H01L27/146;H01L27/148 |
主分类号 |
H01L27/146 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|