| 摘要 |
<p>The invention relates to AlNiCo-based magnetic materials as thin layers, with applications in the micro-electromechanical systems, such as magnetic field sensors, actuation sensors, actuation devices or the like. According to the invention, the materials are made of AlNiFeCoCuNbTiwhere x=5...12%, y=10...25%, z=15...79%, a=5...40%, b=1...5%, c=0...3%, d=0...10%, the layers being intended to be used in the temperature range of -80...110°C, having a saturation magnetic induction B=0.68...1.35 T, a coercive field H=25...160 kA/m, an energy product (BH)=10...60 kJ/m, using double-polished silicon and ceramic plates with surfaces of 0.5 cmand 1 cmas substrates, the deposition taking place under vacuum, at low pressure, ranging between 1x10...5.9x10mbar, the thickness of the deposited layers ranging between 30...300 nm.</p> |
