| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a specimen supporting jig to enable the measurement at a high magnification in a minute region of a specimen to be easily performed. <P>SOLUTION: A specimen supporting jig 12 for fixing and supporting a measured specimen S mounted on a specimen stage 11 during microscopic measurement is made of a non-thermal conductive material. The lower part of the jig is supported by the specimen stage 11. The upper part has at least a thin line shape or a tapered shape, and a tip part 12p is formed on its uppermost surface so that the underside of the measured specimen S is supported at one point by the tip part 12p. <P>COPYRIGHT: (C)2013,JPO&INPIT |
