| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a shape measuring apparatus capable of easily changing a resolution in the plane direction of a measured object and a measuring position. <P>SOLUTION: The shape measuring apparatus includes: a light source 10; a splitter 20 that splits light from the light source 10 into two optical fluxes, irradiates a measured object T with one optical flux and a reference mirror 40 with the other optical flux, and multiplexes the light reflected therefrom; a CCD 50 that captures an image obtained by the light multiplexed by the splitter 20; a DMD (Digital Micromirror Device) having a plurality of micromirrors controlled in two inclination states; and control means that controls the plurality of micromirrors to narrow the irradiation light or the like to the measured object T and the reference mirror 40 and measures the height of a measuring point on the basis of the image having been captured in the state. <P>COPYRIGHT: (C)2013,JPO&INPIT |
