APPARATUS OF INGOT GROWING

摘要

PURPOSE: An ingot growing apparatus is provided to prevent a thermal loss by separating a second radiation shield from a first radiation shield to maintain the function of the second radiation shield. CONSTITUTION: A quartz crucible(20) receives silicon melt. A first radiation shield(52) blocks thermal radiation from the surface of the silicon melt. A second radiation shield(54) is located near the first radiation shield. The first radiation shield is separated from the second radiation shield. A first support unit(42) supports the first radiation shield. A second support unit(44) supports the second radiation shield.